Fabrication of wafer-scale nanopatterned sapphire substrate by hybrid nanoimprint lithography-Reference-Cited by-同舟云学术

Fabrication of wafer-scale nanopatterned sapphire substrate by hybrid nanoimprint lithography

Published:2014-11 Issue:6 Volume:32 Page:06FG06
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Guo Xu,Hu Jing,Zhuang Zhe,Deng Mengmeng,Wu Feixiang,Li Xie,Liu Bin,Yuan Changsheng,Ge Haixiong,Li Feng,Chen Yanfeng

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4898778

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