Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer-Reference-Cited by-同舟云学术

Evaluation of grating realized via pulse current electroplating combined with atomic layer deposition as an x-ray grating interferometer

Published:2019-05 Issue:3 Volume:37 Page:030903
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Song Tae-Eun¹^ORCID,Lee Seho¹²,Han Hee¹,Jung Soonyoung³,Kim Soo-Hyun³,Kim Min Jun⁴,Lee Seung Wook²,Ahn Chi Won¹

Affiliation:

1. National NanoFab Center, 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea

2. School of Mechanical Engineering, Pusan National University, Busandaehak-ro 63 Beon-gil 2, Busan 46241, Republic of Korea

3. School of Materials Science and Engineering, Yeungnam University, 280 Dae-hak-ro, Dae-dong, Gyeongsan-si, Gyeongsangbuk-do 38541, Republic of Korea

4. Department of Mechanical Engineering, Lyle School of Engineering, Southern Methodist University, 3101 Dyer Street, Dallas, Texas 75205

Funder

Open Innovation Program

National Research Foundation of Korea

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5080954

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