Chemical composition and properties of MoAl thin films deposited by sputtering from MoAl compound targets
Author:
Affiliation:
1. Department of Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Franz-Josef-Straße 18, 8700 Leoben, Austria
2. Plansee SE, Metallwerk-Plansee-Straße 71, 6600 Reutte, Austria
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4983689
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