HIGH VOLTAGE BEAM DISCHARGE IN NITROGEN WITH FAST NEUTRAL ATOM REFLECTION FROM TANTALUM CATHODE-Reference-Cited by-同舟云学术

HIGH VOLTAGE BEAM DISCHARGE IN NITROGEN WITH FAST NEUTRAL ATOM REFLECTION FROM TANTALUM CATHODE

Published:2021-08-05 Issue: Volume: Page:207-211
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Container-title:Problems of Atomic Science and Technology
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Author:

Boldasov V.S.,Kuzmichev A.I.,Melnichenko M.S.,Shulaev V.M.

Abstract

The kinetic simulation of high-voltage beam discharge at low pressure of nitrogen is fulfilled. The characteristics of particle flows to the tantalum cathode and back reflection of fast nitrogen atoms are calculated. The reflection coefficient equals tens of percents at voltages up to 100 kV. The generation of fast nitrogen atoms may be used for metals and dielectrics nitriding with implantation effect.

Publisher

Problems of Atomic Science and Technology

Reference10 articles.

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