Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target-Reference-Cited by-同舟云学术

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Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

Published:2020-03 Issue:2 Volume:38 Page:023401
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Rausch Martin¹^ORCID,Mráz Stanislav²,Kreiml Patrice¹,Cordill Megan J.¹³,Schneider Jochen M.²,Winkler Jörg⁴,Mitterer Christian¹^ORCID

Affiliation:

1. Department of Materials Science, Montanuniversität Leoben, Franz-Josef-Straße 18, 8700 Leoben, Austria

2. Materials Chemistry, RWTH Aachen University, Kopernikusstraße 10, 52074 Aachen, Germany

3. Erich Schmid Institute for Materials Science, Austrian Academy of Sciences, Jahnstraße 12, 8700 Leoben, Austria

4. Business Unit Electronics, Plansee SE, Metallwerk-Plansee-Straße 71, 6600 Reutte, Austria

Funder

Österreichische Forschungsförderungsgesellschaft

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5138248

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhanced antifouling and antibacterial performances on polytetrafluoroethylene microporous membranes sputtered with silver nanoparticles;Journal of Vacuum Science & Technology A;2023-12-20

2. Sputter deposition with powder targets: An overview;Vacuum;2021-02

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