Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry-Reference-Cited by-同舟云学术

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Substrate temperature effects on amorphous carbon film growth, investigated by infrared spectroscopy in multiple internal reflection geometry

Published:2009-07 Issue:4 Volume:27 Page:813-817
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Shinohara Masanori,Cho Ken,Matsuda Yoshinobu,Inayoshi Takanori,Kawazoe Hiroki,Fujiyama Hiroshi,Nitta Yuuki,Nakatani Tatsuyuki

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3077278

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