In situ vaporization of very low molecular weight resists using 1/2 nm diameter electron beams
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Published:1981-11
Issue:4
Volume:19
Page:1117-1120
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Isaacson M.,Muray A.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
127 articles.
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