Characteristics of ion‐beam‐sputtered thin films
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Published:1979-03
Issue:2
Volume:16
Page:171-174
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Kane S. M.,Ahn K. Y.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
25 articles.
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