Materials processing using radio-frequency ion-sources: Ion-beam sputter-deposition and surface treatment
Author:
Affiliation:
1. Institute for Experimental Physics I and Center for Materials Research (LaMa), Justus Liebig University Giessen, Giessen, Germany
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5063976
Reference260 articles.
1. Review of sol-gel thin film formation
2. Thin Film Deposition Using Spray Pyrolysis
3. Magnetron sputtering on large scale substrates: an overview on the state of the art
4. Magnetron sputtering: a review of recent developments and applications
5. Pulsed laser vaporization and deposition
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