Microstructure and properties of ultrathin amorphous silicon nitride protective coating-Reference-Cited by-同舟云学术

Microstructure and properties of ultrathin amorphous silicon nitride protective coating

Published:2003-11 Issue:6 Volume:21 Page:1895-1904
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Yen Bing K.,White Richard L.,Waltman Robert J.,Dai Qing,Miller Dolores C.,Kellock Andrew J.,Marchon Bruno,Kasai Paul H.,Toney Michael F.,York Brian R.,Deng Hong,Xiao Qi-Fan,Raman Vedantham

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1615974

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