Author:
Bird H. M. B.,Flemming J. P.
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Experiments on an electron impact ionization ion source with phosphorus;Review of Scientific Instruments;1986-05
2. Physical Limitations of Ion Implantation Equipment;Ion Implantation: Equipment and Techniques;1983
3. Beam optics design for ion implantation;Nuclear Instruments and Methods in Physics Research;1981-10
4. Target chambers for ion implantation using mechanical scanning;Nuclear Instruments and Methods in Physics Research;1981-10
5. Source Feed Materials in Ion Beam Technology;Impurity Doping Processes in Silicon;1981