157 nm: Deepest deep-ultraviolet yet-Reference-Cited by-同舟云学术

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157 nm: Deepest deep-ultraviolet yet

Published:1999 Issue:6 Volume:17 Page:3262
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Rothschild M.,Bloomstein T. M.,Curtin J. E.,Downs D. K.,Fedynyshyn T. H.,Hardy D. E.,Kunz R. R.,Liberman V.,Sedlacek J. H. C.,Uttaro R. S.,Bates A. K.,Van Peski C.

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 68 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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