Focused ion beam metrology
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Published:1995-11
Issue:6
Volume:13
Page:2629
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
9 articles.
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1. Copper device editing: Strategy for focused ion beam milling of copper;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002
2. FIB metrology in advanced lithography;SPIE Proceedings;2000-06-02
3. Novel strategies for evaluating the degradation of protective coatings on superalloys;International Journal of Inorganic Materials;1999-12
4. Inspection Techniques;Failure Analysis of Integrated Circuits;1999
5. Ion beams in silicon processing and characterization;Journal of Applied Physics;1997-05-15