Copper device editing: Strategy for focused ion beam milling of copper-Reference-Cited by-同舟云学术

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Copper device editing: Strategy for focused ion beam milling of copper

Published:2002 Issue:6 Volume:20 Page:2682
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Casey J. David,Phaneuf Michael,Chandler Clive,Megorden Michael,Noll Kathryn E.,Schuman Richard,Gannon Thomas J.,Krechmer Alex,Monforte David,Antoniou Nicholas,Bassom Neil,Li Jian,Carleson Peter,Huynh Chuong

Publisher

American Vacuum Society

Subject

General Engineering

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