Inspection Techniques
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Publisher
Springer US
Link
http://link.springer.com/content/pdf/10.1007/978-1-4615-4919-2_10
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3. Wagner A, Longo P, Cohen, Blauner P. Focused Ion Beam Metrology. Journal of Vacuum Science and Technology B, 1995, 13(6), 2629.
4. Barr DL, Brown WL. Contrast Formation in Focused Ion Beam Images of Polycrystalline Aluminum. Journal of Vacuum Science and Technology B, 1995, 13(6), 2580.
5. Okihara M, Tanaka H, Hirashita N, Nakamura T, Okada H, Hijikata Y, Shimoda K. Pin-Point Transmission Electron Microscopic Analysis Applied to Off-Leakage Failures of a Bipolar Transistor in 0.5 micron BICMOS Devices. Proceedings International Symposium for Testing and Failure Analysis, 1996, 207.
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1. Failure Analysis;Handbook of Semiconductor Manufacturing Technology, Second Edition;2007-07-09
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