Comparison study of the low temperature growth of dilute GeSn and Ge-Reference-Cited by-同舟云学术

Comparison study of the low temperature growth of dilute GeSn and Ge

Published:2017-11 Issue:6 Volume:35 Page:061204
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Grant Perry C.¹,Dou Wei,Alharthi Bader,Grant Joshua M.²,Mosleh Aboozar³,Du Wei⁴,Li Baohua⁵,Mortazavi Mansour⁴,Naseem Hameed A.,Yu Shui-Qing

Affiliation:

1. Arktonics LLC, 1339 S. Pinnacle Dr., Fayetteville, Arkansas 72701; Microelectonics-Photonics Program, University of Arkansas, 731 West Dickson St., Fayetteville, Arkansas 72701; and Department of Electrical Engineering, University of Arkansas, 3217 Bell Engineering Center, Fayetteville, Arkansas 72701

2. Microelectonics-Photonics Program, University of Arkansas, 731 West Dickson St., Fayetteville, Arkansas 72701 and Department of Electrical Engineering, University of Arkansas, 3217 Bell Engineering Center, Fayetteville, Arkansas 72701

3. Department of Electrical Engineering, University of Arkansas, 3217 Bell Engineering Center, Fayetteville, Arkansas 72701

4. Department of Physics and Chemistry, University of Arkansas at Pine Bluff, 1200 University Dr., Pine Bluff, Arkansas 71601

5. Arktonics LLC, 1339 S. Pinnacle Dr., Fayetteville, Arkansas 72701

Funder

National Aeronautics and Space Administration

DOD | USAF | AFMC | Air Force Office of Scientific Research

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/am-pdf/10.1116/1.4990773

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