Analysis of pulse‐time modulated high‐density discharges-Reference-Cited by-同舟云学术

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Analysis of pulse‐time modulated high‐density discharges

Published:1996-07 Issue:4 Volume:14 Page:2122-2126
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Meyyappan M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.580090

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Simulation study of the nanoparticles nucleation in a pulse-modulated capacitively coupled rf acetylene discharge;Physics of Plasmas;2018-06

4. Pulsed Cl2/Ar inductively coupled plasma processing: 0D model versus experiments;Journal of Physics D: Applied Physics;2014-10-23

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