1. Applied Physics and Semiconductor Spectroscopy/Applied Physics and Sensor Technology, Brandenburg University of Technology Cottbus-Senftenberg, K.-Zuse-Str. 1, 03046 Cottbus, Germany
2. SENTECH Instruments GmbH, Schwarzschildstraße 2, 12489 Berlin, Germany
3. IHP—Leibniz-Institut für innovative Mikroelektronik, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany
4. Institute for Applied Chemistry, Brandenburg University of Technology Cottbus-Senftenberg, K.-Zuse-Str. 1, 03046 Cottbus, Germany
5. Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University, V Holešovičkách 2, 18000, Prague 8, Czech Republic
6. Applied Physics and Sensor Technology, Brandenburg University of Technology Cottbus-Senftenberg, K.-Wachsmann-Allee 17, 03046 Cottbus, Germany