Author:
Harriott L. R.,Brown W. L.,Barr D. L.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
6 articles.
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1. Review of high brightness ion sources for microlithography (invited);Review of Scientific Instruments;1996-03
2. High‐resolution focused ion beams;Review of Scientific Instruments;1993-05
3. Focused ion beam lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-03
4. The technology of finely focused ion beams;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1991-04
5. Critical issues in the application of a gallium probe to high resolution secondary ion imaging;Surface Science;1991-04