Author:
Boo J.-H.,Lee S.-B.,Lee K.-W.,Yu K.-S.,Kim Y.,Yeon S. H.,Jung I. N.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
6 articles.
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1. High-Speed Epitaxial Growth of β-SiC Film on Si(111) Single Crystal by Laser Chemical Vapor Deposition;Journal of the American Ceramic Society;2012-07-06
2. A mechanistic study of gas-phase reactions with 1,1,3,3-tetramethyl-1,3-disilacyclobutane in the hot-wire chemical vapor deposition process;Thin Solid Films;2009-04
3. Cubic SiC Nano-Thin Films and Nano-Wires: High Vacuum Metal-Organic Chemical Vapor Deposition, Surface Characterization, and Application Tests;Journal of Nanoscience and Nanotechnology;2008-10-01
4. Cubic SiC Nano-thin Films and Nano-wires: High Vacuum MOCVD, Surface Characterization, and Application Tests;2006 IEEE Conference on Emerging Technologies - Nanoelectronics;2006
5. Single-Source Chemical Vapor Deposition of SiC Films in a Large-Scale Low-Pressure CVD Growth, Chemical, and Mechanical Characterization Reactor;Journal of The Electrochemical Society;2006