Study of volume and surface processes in low pressure radio frequency plasma reactors by pulsed excitation methods. I. Hydrogen

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Study of volume and surface processes in low pressure radio frequency plasma reactors by pulsed excitation methods. I. Hydrogen–argon plasma

Published:1991-03 Issue:2 Volume:9 Page:317-326
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Bouchoule André,Ranson Pierre

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.577508

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