Review of electrical characterization of ultra-shallow junctions with micro four-point probes-Reference-Cited by-同舟云学术

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Published:2010-01 Issue:1 Volume:28 Page:C1C27-C1C33
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Petersen Dirch H.,Hansen Ole,Hansen Torben M.,Bøggild Peter,Lin Rong,Kjær Daniel,Nielsen Peter F.,Clarysse Trudo,Vandervorst Wilfried,Rosseel Erik,Bennett Nick S.,Cowern Nick E. B.

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3224898

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