Author:
Bretoiu S.,Di Mola D.,Fioravanti E.,Visona S.
Cited by
4 articles.
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1. A Novel strategy to enhance micro/nano-tribological properties of DLC film by combining micro-pattern and thin ionic liquids film;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2013-07
2. Micro/Nano-Texture Design for Improving Tribological Properties of DLC-IL Composite Films;Nanoscience and Nanotechnology Letters;2012-09-01
3. Silicon nitride nanotemplate fabrication using inductively coupled plasma etching process;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2011-09
4. Photomask plasma etching: A review;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2006