Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation-Reference-Cited by-同舟云学术

Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation

Published:2010-11 Issue:6 Volume:28 Page:C6N12-C6N17
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Woszczyna Mirosław,Zawierucha Paweł,Pałetko Piotr,Zielony Michał,Gotszalk Teodor,Sarov Yanko,Ivanov Tzvetan,Frank Andreas,Zöllner Jens-Peter,Rangelow Ivo W.

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3518465

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