Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation-Reference-Cited by-同舟云学术

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Study of the Efficiency of Microcantilevers: Cases of Electrothermal and Electromagnetic Actuation

Published:2022-10 Issue:5 Volume:31 Page:784-790
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Pruchnik B.¹^ORCID,Piasecki T.¹,Orlowska K.¹,Majstrzyk W.¹,Sierakowski A.²,Gotszalk T.¹,Rangelow I.³

Affiliation:

1. Department of Nanometrology, Wrocław University of Science and Technology, Wrocław, Poland

2. Łukasiewicz Research Network—Institute of Microelectronics and Photonics, Warsaw, Poland

3. Department of Micro- and Nanoelectronical Systems, Technische Universität Ilmenau, Ilmenau, Germany

Funder

National Science Centre OPUS Program 19 Project: Nottingham Effect Nanometrology Guided by Operational Micro-Electromechanical Systems

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/9906516/09826294.pdf?arnumber=9826294

Reference20 articles.

1. Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors

2. Sol-gel derived PZT force sensor for scanning force microscopy

3. The noise analysis in the micromechanical resonance sensors;józwiak;Przeglad Elektrotechniczny,2010

4. Closed-loop surface stress compensation with an electromagnetically actuated microcantilever

5. Optimal Design of Electromagnetically Actuated MEMS Cantilevers

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1. Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition;Journal of Microelectromechanical Systems;2024-06

2. Transformer bridge-based metrological unit for scanning thermal microscopy with resistive nanoprobes;Measurement Science and Technology;2024-05-03

3. Integration of piezoelectric and electrothermal actuators for high-resolution Atomic Force Microscopy;Mechatronics;2024-05

4. Wavelet-based information theory in quantitative assessment of AFM images’ quality;Scientific Reports;2024-02-18

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