Charging suppression in focused-ion beam fabrication of visible subwavelength dielectric grating reflector using electron conducting polymer-Reference-Cited by-同舟云学术

Charging suppression in focused-ion beam fabrication of visible subwavelength dielectric grating reflector using electron conducting polymer

Published:2015-11 Issue:6 Volume:33 Page:06F701
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Alias Mohd Sharizal¹,Liao Hsien-Yu¹,Ng Tien Khee¹,Ooi Boon Siew¹

Affiliation:

1. Photonics Laboratory, Computer, Electrical, and Mathematical Sciences and Engineering (CEMSE), King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Saudi Arabia

Funder

King Abdullah University of Science and Technology (KAUST)

King Abdulaziz City for Science and Technology (KACST)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://scitation.aip.org/deliver/fulltext/avs/journal/jvstb/33/6/1.4929152.pdf?itemId=/content/avs/journal/jvstb/33/6/10.1116/1.4929152&mimeType=pdf&containerItemId=content/avs/journal/jvstb

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