Low‐frequency turbulent transport in magnetron plasmas-Reference-Cited by-同舟云学术

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Low‐frequency turbulent transport in magnetron plasmas

Published:1989-05 Issue:3 Volume:7 Page:1014-1018
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sheridan T. E.,Goree J.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.576221

Cited by 57 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar;Results in Engineering;2022-12

2. The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target;Plasma Chemistry and Plasma Processing;2022-10-22

3. Study of Plasma Parameters and Deposition Rate of Titanium Thin Film in a DC Magnetron Sputtering Method;Plasma Physics Reports;2022-05

4. Physics and technology of magnetron sputtering discharges;Plasma Sources Science and Technology;2020-11-01

5. Physics of high power impulse magnetron sputtering discharges;High Power Impulse Magnetron Sputtering;2020

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