Effect of cooling system design on the heat dissipation of the magnetron sensitive components with rectangular target during sputtering by Ar
Author:
Funder
Russian Science Foundation
Publisher
Elsevier BV
Subject
General Engineering
Reference37 articles.
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3. Effect of temperature and deposition technology on the microstructure, chemistry and tribo-mechanical characteristics of Ti-B based thin films by magnetron sputtering;Deambrosis;Surf. Coat. Technol.,2021
4. Effect of Ta alloying on isothermal oxidation behavior of DC magnetron sputtered Ti1-xAlxN coatings on titanium substrate;Shugurov;Surf. Coat. Technol.,2021
5. Sputter Deposition;Westwood,2003
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