Etch rate control in a 27 MHz reactive ion etching system for ultralarge scale integrated circuit processing-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Etch rate control in a 27 MHz reactive ion etching system for ultralarge scale integrated circuit processing

Published:1999-07 Issue:4 Volume:17 Page:1562-1569
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Tatsumi T.,Hikosaka Y.,Morishita S.,Matsui M.,Sekine M.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582102

Cited by 70 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomistic Simulation of HF Etching Process of Amorphous Si₃N₄ Using Machine Learning Potential;ACS Applied Materials & Interfaces;2024-08-28

2. Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated SiN Films Using HF/H₂ and CF₄/H₂ Plasmas;ACS Applied Electronic Materials;2023-12-12

3. Ion energy distribution measurement device using a capillary plate with high-aspect ratio;Physics of Plasmas;2023-12-01

4. Phenomenological model for predicting C _x H _y F _z ⁺ ion etching yields of SiO₂ and SiN _x substrates;Japanese Journal of Applied Physics;2023-05-02

5. An Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated Sin Films Using Hf/H2 and Cf4/H2 Plasmas;2023

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP