Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. In situ submicron patterning with silicon nitride evaporation masks;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
2. Applications of Ion Microbeams Lithography and Direct Processing;Handbook of VLSI Microlithography;2001
3. Lithography;Fundamentals of Semiconductor Processing Technology;1995
4. Pattern distortions in stencil masks;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-11
5. The Effect of Crystal Structure on Sputtering: Molecular Dynamics Calculations;MRS Proceedings;1994