Atomic layer deposition of cobalt oxide on oxide substrates and low temperature reduction to form ultrathin cobalt metal films
Author:
Affiliation:
1. McKetta Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas 78712
2. Microelectronics Research Center, The University of Texas at Austin, Austin, Texas 78758
Funder
National Science Foundation
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.5063669
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