Composition analysis of III–V materials grown in nanostructures: The self-focusing-SIMS approach-Reference-Cited by-同舟云学术

Composition analysis of III–V materials grown in nanostructures: The self-focusing-SIMS approach

Published:2016-05 Issue:3 Volume:34 Page:03H127
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Franquet Alexis,Douhard Bastien,Conard Thierry,Melkonyan Davit,Vandervorst Wilfried

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4943950

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