Ex situ Ohmic contacts to n-InGaAs-Reference-Cited by-同舟云学术

Ex situ Ohmic contacts to n-InGaAs

Published:2010-07 Issue:4 Volume:28 Page:C5I7-C5I9
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Baraskar Ashish,Wistey Mark A.,Jain Vibhor,Lobisser Evan,Singisetti Uttam,Burek Greg,Lee Yong Ju,Thibeault Brian,Gossard Arthur,Rodwell Mark

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3454372

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