Kinetic study of 3C-SiC growth on Si by pyrolyzing tetramethysilane in low pressure radio frequency-induction heated chemical vapor deposition reactor
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.582272
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2. Rapid Heating of Silicon Carbide Fibers under Radio Frequency Fields and Application in Curing Preceramic Polymer Composites;ACS Applied Materials & Interfaces;2019-11-15
3. Mechanism of the thermal decomposition of tetramethylsilane: a flash pyrolysis vacuum ultraviolet photoionization time-of-flight mass spectrometry and density functional theory study;Physical Chemistry Chemical Physics;2018
4. Selective area laser deposition of FCC beta silicon carbide;Crystal Research and Technology;2016-07
5. Thermal decomposition of tetramethylsilane and tetramethylgermane by flash pyrolysis vacuum ultraviolet photoionization time-of-flight mass spectrometry;International Journal of Mass Spectrometry;2014-11
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