Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations-Reference-Cited by-同舟云学术

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Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations

Published:1999-09 Issue:5 Volume:17 Page:2896-2905
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Drüsedau Tilo P.,Bock Torsten,John Thomas-Maik,Klabunde Frank,Eckstein Wolfgang

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581957

Cited by 66 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of Heat Flow at Substrate during Sputtering of Copper–Titanium Sandwich Target;Materials;2024-07-21

2. The Energy Flux to the Substrate in the High-Power Impulse Magnetron Sputtering of Copper Films;Bulletin of the Russian Academy of Sciences: Physics;2023-12

3. The influence of pulse duration and duty cycle on the energy flux to the substrate in high power impulse magnetron sputtering;Vacuum;2023-10

4. Co-Sputtering Crystal Lattice Selection for Rare Earth Metal-Based Multi Cation and Mixed Anion Photochromic Films;Nanomaterials;2023-02-09

5. Dependence of film structure on the film structure-independent equivalent film thickness in magnetron sputtering deposition of Ag thin films;Journal of Vacuum Science & Technology A;2022-09

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