Dependence of F atom density on pressure and flow rate in CF4 glow discharges as determined by emission spectroscopy-Reference-Cited by-同舟云学术

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Dependence of F atom density on pressure and flow rate in CF4 glow discharges as determined by emission spectroscopy

Published:1981-03 Issue:2 Volume:18 Page:353-356
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Coburn J. W.,Chen M.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.570781

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