Author:
Lim Michael H.,Ferrera Juan,Pipe K. P.,Smith Henry I.
Cited by
4 articles.
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1. Analyses of vector Gaussian beam propagation and the validity of paraxial and spherical approximations;Journal of the Optical Society of America A;2002-02-01
2. Method for reducing hyperbolic phase in interference lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
3. Calculational study on membrane mask distortion and correction;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
4. Membrane-mask distortion correction: Analytical and experimental results;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000