Author:
Murooka Ken-ichi,Lim Michael H.,Smith Henry I.
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. System optimization of membrane mask distortion correction based on Fourier analysis;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004
2. Adaptive membrane masks;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003
3. Effect of thermal diffusion on a membrane-mask-distortion correction and compensation method;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002
4. Membrane mask magnification correction: Alternate technique;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002