Author:
Murooka Ken-ichi,Lim Michael H.,Smith Henry I.
Cited by
3 articles.
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1. Induced thermal stress fields for three-dimensional distortion control of Si wafer topography;Review of Scientific Instruments;2004-06
2. System optimization of membrane mask distortion correction based on Fourier analysis;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2004
3. Adaptive membrane masks;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2003