Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate-Reference-Cited by-同舟云学术

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Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rate

Published:2012-05 Issue:3 Volume:30 Page:031603
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Ugur D.,Storm A. J.,Verberk R.,Brouwer J. C.,Sloof W. G.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3700231

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of hydrogen flow rate on properties of silicon oxycarbide thin films via hot wire chemical vapor deposition;International Journal of Applied Ceramic Technology;2024-05-17

2. Application of a dual-thermopile radical probe to expanding hydrogen plasmas;Plasma Sources Science and Technology;2022-08-01

3. Radical recombination sensor based on dual probe thermopile heat flux sensors;Journal of Vacuum Science & Technology A;2019-12

4. Facile and Efficient Atomic Hydrogenation Enabled Black TiO 2 with Enhanced Photo‐Electrochemical Activity via a Favorably Low‐Energy‐Barrier Pathway;Advanced Energy Materials;2019-07-25

5. Density evaluation of remotely-supplied hydrogen radicals produced via tungsten filament method for SiCl4 reduction;Japanese Journal of Applied Physics;2018-04-04

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