Author:
Komori H.,Ueno Y.,Hoshino H.,Ariga T.,Soumagne G.,Endo A.,Mizoguchi H.
Publisher
Springer Science and Business Media LLC
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference11 articles.
1. Y. Watanabe, K. Ota, H. Franken, V. Banine, EUV Source Workshop, February 2005, Proceedings available at www.sematech.org
2. G. Soumagne, T. Abe, T. Suganuma, Y. Imai, H. Someya, H. Hoshino, M. Nakano, H. Komori, Y. Takabayashi, T. Ariga, Y. Ueno, Y. Wada, A. Endo, K. Toyoda, Proc. SPIE 5751, 822 (2005)
3. H. Tanaka, K. Akinaga, A. Takahashi, T. Okada, Jpn. J. Appl. Phys. 43, L585 (2004)
4. G. Kooijman, R. de Bruijn, K. Koshelev, F. Bijkerk, W. Shaikh, A.J. Bodey, G. Hirst, Central Laser Facility Annual Report 2001/2002, 142
5. B. Hansson, H. Hertz, J. Phys. D Appl. Phys. 37, 3233 (2004)
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