Fabrication of piezoelectric AlN thin film for FBARs

Author:

Liu Wei-Kuo,Tay Kok-Wan,Kuo Sin-Cha,Wu Menq-Jion

Publisher

Springer Science and Business Media LLC

Reference7 articles.

1. Ruby R C, Bradley P D, Oshmyansky Y, et al. Thin film bulk wave acoustic resonators (FBAR) for wireless applications. IEEE Ultrasonics Symp, 2001, 1: 813–821

2. Larson J D, Ruby R C, Bradley P D, et al. Power handing and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band. IEEE Ultrasonics Symp, 2000, 1: 869–874

3. Ruby R C, Larson J D, Bradley P D, et al. Ultra-miniature high-Q filters and duplexers using FBAR technology. IEEE International Solid State Circuits Conference, 2001. 120

4. Lakin K M, Wang J S, Kline G R, et al. Thin film resonators and filters. IEEE Ultrasonic Symp Proc, 1982, 1: 466

5. Lakin K M, Kline G R, McCarron K T. Development of miniature filter for wireless applications. IEEE Trans Microwave Theory Tech, 1995, 43(12): 2933–2939[DOI]

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