Author:
Ekwińska Magdalena A.,Zając Jerzy,Zaborowski Michał,Szmigiel Dariusz
Publisher
Springer International Publishing
Reference10 articles.
1. Xu, R., Kim, S.G.: Figures of merits of piezoelectric materials in energy harvesters. PowerMEMS (2012). 978-0-9743611-9-2/PMEMS2012
2. MEMSnet. http://www.memsnet.org . Accessed 1 Mar 2017
3. Zong, D.G., et al.: Tensile strength of aluminium nitride films. Phil. Mag. 84, 3337–3353 (2003). doi: 10.1080/14786430412331283604
4. Gerfers, F., Kohlstadt, P.M., Ginsburg, E., He, M.Y., Samara-Rubio, D., Manoli, Y., Wang, L.: Sputtered AlN thin films for piezoelectric MEMS devices - FBAR resonators and accelerometers. In: Solid State Circuits Technologies, p. 462 (2010)
5. Wei-Kuo, L., Kok-Wan, T., Sin-Cha, K., Menq-Jion, W.: Fabrication of piezoelectric AlN thin film for FBARs. Sci. China Ser. G 52, 226–232 (2009)
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献