Author:
Bazaz Shafaat A.,Iqbal Abid,Khan M. Shuja
Publisher
Springer Science and Business Media LLC
Reference14 articles.
1. Roylance L.M., Angell J.B.: Batch-fabricated silicon accelerometer. IEEE Trans. Electron Devices 26, 1911–1917 (1979)
2. Yazdi N., Najafi K.: An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process. J. Microelectromech. Syst. 9(4), 544–550 (2000)
3. Pottenger, M.D.: Design of micromachined inertial sensors. PhD Dissertation, Univ. of California (2001)
4. Tsai, M.-H., Sun, C.-M., Wang, C., Lu, J., Fang, W.: A monolithic 3D fully-differential CMOS accelerometer. In: Proceedings of the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Sanya, China, January 6–9 (2008)
5. Tsuchiya T., Funabashi H.: A z-axis differential capacitive SOI accelerometer with vertical comb electrodes. Sens. Actuators A Phys. 116(3), 378–383 (2004)
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