Monolithic Tri-Axes Nickel-Based Accelerometer Design Verified Through Finite Element Analysis

Author:

Bazaz Shafaat A.,Iqbal Abid,Khan M. Shuja

Publisher

Springer Science and Business Media LLC

Subject

Multidisciplinary

Reference14 articles.

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2. Yazdi N., Najafi K.: An all-silicon single-wafer micro-g accelerometer with a combined surface and bulk micromachining process. J. Microelectromech. Syst. 9(4), 544–550 (2000)

3. Pottenger, M.D.: Design of micromachined inertial sensors. PhD Dissertation, Univ. of California (2001)

4. Tsai, M.-H., Sun, C.-M., Wang, C., Lu, J., Fang, W.: A monolithic 3D fully-differential CMOS accelerometer. In: Proceedings of the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Sanya, China, January 6–9 (2008)

5. Tsuchiya T., Funabashi H.: A z-axis differential capacitive SOI accelerometer with vertical comb electrodes. Sens. Actuators A Phys. 116(3), 378–383 (2004)

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