Design and simulation of a novel MEMS-based single proof mass three-axis piezo-capacitive accelerometer
Author:
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
https://link.springer.com/content/pdf/10.1007/s00542-023-05604-9.pdf
Reference38 articles.
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2. Algamili AS, Khir MHM, Dennis JO, Ahmed AY, Alabsi SS, Hashwan SSB et al (2021) A review of actuation and sensing mechanisms in MEMS-based sensor devices. Nanoscale Res Lett 16:1–21
3. Aydemir A, Terzioglu Y, Akin T (2016) A new design and a fabrication approach to realize a high performance three axes capacitive MEMS accelerometer. Sens Actuators A 244:324–333
4. Balfas M, Ahamed SI, Tamma C, Arif M, Kattan AJ, Chu W (2018) A study and estimation a lost person behavior in crowded areas using accelerometer data from smartphones, 2018 IEEE 42nd Annual Computer Software and Applications Conference (COMPSAC), IEEE, pp. 860–5
5. Bazaz SA, Iqbal A, Khan MS (2013) Monolithic tri-axes nickel-based accelerometer design verified through finite element analysis. Arab J Sci Eng 38:2103–2113
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