Active gap reduction in comb drive of three axes capacitive micro accelerometer for enhancing sense capacitance and sensitivity-Reference-Cited by-同舟云学术

Active gap reduction in comb drive of three axes capacitive micro accelerometer for enhancing sense capacitance and sensitivity

Published:2014-11-28 Issue:6 Volume:21 Page:1301-1312
ISSN:0946-7076
Container-title:Microsystem Technologies
language:en
Short-container-title:Microsyst Technol

Author:

Riaz Kashif,Iqbal Abid,Mian M. Umer,Bazaz Shafaat A.

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Hardware and Architecture,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://link.springer.com/content/pdf/10.1007/s00542-014-2377-3.pdf

Reference16 articles.

1. Ayazi F, Najafi K (2000) High aspect-ratio combined poly and single crystal silicon (HARPSS) MEMS technology. J Microelectromech Syst 9:288–294

2. Bazaz SA, Iqbal A, Khan MS (2013) Monolithic tri-axes nickel based accelerometer design verified through finite element analysis. Arab J Sci Eng 38:2103–2113

3. Bellot MM (2007) Microelectromechanical sytems (MEMS) safe and arm devices. Master thesis, Air Force Institute of Technology, USA

4. CoventorWare (2011) Description of CoventorWare, CoventorWare for MEMS CAD Design. http://www.coventor.com/coventorware.html

5. Cowen A, Dudley B, Hill E, Walters M, Wood R, Johnson S, Wynands H, Hardy B (2000) MetalMUMPs Design Handbook. Revision 2.0, MEMSCap Inc., USA. http://www.memscap.com/mumps/documents/MetalMUMPs.DR.2.0.pdf

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