Author:
Job R.,Ulyashin A.G.,Fahrner W.R.,Ivanov A.I.,Palmetshofer L.
Publisher
Springer Science and Business Media LLC
Subject
General Materials Science,General Chemistry
Cited by
22 articles.
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1. Nanoschichten;Nanotechnologie und Nanoprozesse;2016-05-13
2. Incorporation of oxygen in SiC implanted with hydrogen;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2015-12
3. Diffusion and impurity segregation in hydrogen-implanted silicon carbide;Journal of Applied Physics;2014-06-14
4. Hydrogen gettering in annealed oxygen-implanted silicon;Semiconductor physics, quantum electronics and optoelectronics;2010-04-30
5. Detection of Vacancy Distributions by Decoration with Hydrogen;ECS Transactions;2009-09-25