Author:
Zhao Ji-Hong,Li Chun-Hao,Wang Jian-Nan
Funder
National Natural Science Foundation of China
China Postdoctoral Science Foundation
Publisher
Springer Science and Business Media LLC
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference28 articles.
1. Amer, M.S., El-Ashry, M.A., Dosser, L.R., Hix, K.E., Maguire, J.F., Irwin, B.: Femtosecond versus nanosecond laser machining: comparison of induced stresses and structural changes in silicon wafers. Appl. Surf. Sci. 242, 162–167 (2005)
2. Carey, J.E.: Femtosecond-laser microstructuring of silicon for novel optoelectronic devices. Ph.D. Thesis, Harvard University (2004)
3. Crouch, C.H., Carey, J.E., Warrender, J.M., Aziz, M.J., Mazur, E., Génin, F.Y.: Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon. Appl. Phys. Lett. 84, 1850–1852 (2004)
4. Fowlkes, J.D., Pedraza, A.J., Lowndes, D.H.: Microstructural evolution of laser-exposed silicon targets in SF6 atmospheres. Appl. Phys. Lett. 77, 1629–1631 (2000)
5. Her, T.H., Finlay, R.J., Wu, C., Deliwala, S., Mazur, E.: Microstructuring of silicon with femtosecond laser pulses. Appl. Phys. Lett. 73, 1673–1675 (1998)
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