Microstructural evolution of laser-exposed silicon targets in SF6 atmospheres
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1308538
Reference10 articles.
1. Semiconductor Surface Damage Produced by Ruby Lasers
2. Semiconductor Surface Damage Produced by Ruby Lasers
3. Microstructuring of silicon with femtosecond laser pulses
4. Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation
5. Multiple photon excited SF6 interaction with silicon surfaces
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