Comparison of structure and properties of femtosecond and nanosecond laser-structured silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1667004
Reference9 articles.
1. Microstructuring of silicon with femtosecond laser pulses
2. Silicon microcolumn arrays grown by nanosecond pulsed-excimer laser irradiation
3. Near-unity below-band-gap absorption by microstructured silicon
4. Infrared absorption by conical silicon microstructures made in a variety of background gases using femtosecond-laser pulses
5. Depth distributions of sulfur implanted into silicon as a function of ion energy, ion fluence, and anneal temperature
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